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Tecan produces SU8 parts by a photolithography process with dimensions in the micron range, with sub micron tolerances possible. The ultra-accurate three-dimensional parts can be produced with 'holes' and 'lands' up to ten times thinner than their own height - an aspect ratio of 10:1. This allows the production of any combination of narrow holes, or lands, in deep substrates in close proximity. Large numbers of components are fabricated on a single sheet. This allows designers and developers to produce multiple parts with subtle design variations for design validation and prototyping.

Although laser and micro-milling techniques are capable of similar ratio levels, they do not necessarily produce smooth wall surfaces and do not always lend themselves to volume production in the same way as PEF.

Typical end-user applications include micro electromechanical systems (MEMS) and optical MEMS, sensors, actuators, bio-chips, micro gears and calibration tools.

www.tecan.co.uk